SRC Nonclassical CMOS Research Center

     

 
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What is the SRC Center?

Sub 20 nm scaling of Si CMOS faces considerable physical and technological obstacles.  It is imperative to investigate strong potential alternatives. III-V materials,  have high electron mobilities and offer the potential of surpassing the 22 nm SIA roadmap goals.

Challenges faced in developing III-V devices as an enhancement to Si CMOS include developing gate insulator with acceptable surface state density and minimal impact upon mobility, and growth and integration of into a Si process.  Device-level challenges include the effect of the light electron on vertical confinement, transconductance, and tunneling, and the impact of vertical confinement on subthreshold slope and DIBL.  Robust counterparts of Si fabrication processes must be developed for III-V CMOS.

To address these substantial challenges, the SRC nonclassical CMOS center has formed a team of expert researchers in III-V materials, devices and fabrication processes.  Research tasks include development of low-surface-state-density high-K gate dielectrics, device design and modeling, development of fabrication process modules and device fabrication and characterization, and integration of III-V materials onto Silicon
 
 


Areas of Research

 

Dielectrics ~ Paul McIntyre, Leader

* MBE Growth and Characterization ~ Chris Palmstrom (University of Minnesota)
* Atomic Layer Deposition ~ Paul McIntyre (Stanford University)
* Analysis and Characterization ~ Susanne Stemmer (UCSB)
* Growth and Characterization ~ Andrew Kummel (UCSB)
* Analysis and Modeling ~ Chris Van de Walle (UCSB)

Devices ~ Mark Rodwell, Leader

* Device Design ~ Yuan Taur (UCSD)
* III-V Implecations for Design ~ Peter Asbeck (UCSD)
* III-V Transport Modeling ~ Max Fischetti (Univer. of Mass., Amherst)
* Device Fabrication ~ Mark Rodwell (UCSB)
* III-V Channel Growth ~ Art Gossard (UCSB)

Integration ~ Chris Palmstrom, Leader

* III-V Silicon ~ James Harris (Stanford University)
* Selective Area III-V Growth ~ Peter Asbeck (UCSD)
* Characterization ~ Suzanne Stemmer (UCSB)
* ~ Paul McIntyre (Stanford University)