University of California, Santa Barbara
Department of Electrical and Computer Engineering

Solid State Device Processing

ECE 220A/Materials 215A - Fall 2007

Instructor: Prof. Evelyn Hu

Course Information:

TA:

George Saddik (gnsaddik@umail.ucsb.edu)
Adele Tamboli (atamboli@umail.ucsb.edu)

Final Exam

Homework:

• Homework 1
  • Optical_Lithography
• Homework 2
  • Sintering of Metal Contacts to Silicon
  • Metal Evaporation
  • Evaporated Metal Lift-Off Process
  • Resist Soak
• Homework 3
  • furnace cleanliness
  • phosphorus predeposition
  • oxidation

Lectures:

• Lecture 1
• Lecture 2
• Lecture 3
• Lecture 4
• Lecture 5
• Lecture 6
• Lecture 7
• Lecture 8
• Lecture 9
• Reading for Lecture 9
• Lecture 10
• Lecture 11
• Lecture 12
• Lecture 13

Lab

• Lab notes
• instrumentation
• Capacitance

Your Choice

1. overview
2. reading 1
3. reading 2
4. reading 3
5. reading 4

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Last Updated: December 6, 2007