University of California,
Santa Barbara
Department of Electrical and Computer Engineering
Semiconductor Device Processing
ECE 220A Fall 2008
Instructor: Prof, Evelyn Hu
Schedule:Tu/Th 12 - 1:50, F 10-10:50
Phelps 1437
This course is intended as an introduction to semiconductor fabrication technology, looking at the basic processes that are used for silicon and compound semiconductor device fabrication.
The goals of the course are to (1) develop a practical understanding of the underlying principles and usage of photolithography, (2) learn the theory and practice of metallization, wet etching, oxidation and diffusion, (3) utilize these processes to make simple device structures which will be electrically characterized.
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Last Updated: December 8, 2008